Photonic band-gap waveguide microcavities: Monorails and air bridges

Photonic band-gap monorail and air-bridge waveguide microcavities, operating at the wavelength regime of 1550 nm, are fabricated using GaAs-based compound semiconductors. The fabrication process involves gas-source molecular beam epitaxy, electron-beam lithography, reactive ion etching, and thermal wet oxidation of Al0.93Ga0.07As.The fabrication of the air-bridge microcavity, in particular, also entails the sacrificial wet etch of AlxOy to suspend the micromechanical structure. The monorail and air-bridge microcavities have been optically characterized and the transmission spectra exhibit resonances in the 1550 nm wavelength regime. Tunability of the resonant wavelength is demonstrated through changing the defect size in the one-dimensional photonic crystal. The quality factors (Q) of the microcavities are about 140 for the monorail and 230 for the air bridge, respectively. © 1999 American Vacuum Society. @S0734-211X~99!03303-X#